Author:
Hirai Kouichi,Takai Mikio,Kinomura Atsushi,Namba Susumu
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by
3 articles.
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1. Nuclear microprobe analysis of implantation damage induced by focused gallium ion beams in GaAs;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1995-09
2. Channeling contrast analysis of GaAs side-walls fabricated by laser wet chemical etching;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1994-03
3. Nuclear microprobe development and application to microelectronics;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1994-03