Author:
Takai M.,Hara S.,Kishimoto T.,Yanagisawa J.
Subject
Instrumentation,Nuclear and High Energy Physics
Cited by
4 articles.
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1. Enhanced dynamic annealing in Ga+ ion-implanted GaN nanowires;Applied Physics Letters;2003-01-20
2. Applications of nuclear microprobes in the semiconductor industry;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1996-06
3. Applications of focused MeV ions to materials modification and analysis;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1995-09
4. Applications of nuclear microprobes to semiconductor process developments;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1995-09