Buried insulator formation by nitrogen implantation at elevated temperatures-Reference-Cited by-同舟云学术

Buried insulator formation by nitrogen implantation at elevated temperatures

Published:1991-04 Issue:1-4 Volume:55 Page:734-737
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Hatzopoulos N.,Bussmann U.,Robinson A.K.,Hemment P.L.F.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference6 articles.

Cited by 12 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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