Author:
Inoue K.,Takai M.,Ishibashi K.,Hirai K.,Kawata Y.,Namba S.
Subject
Instrumentation,Nuclear and High Energy Physics
Cited by
9 articles.
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1. Study on spatial resolution of three-dimensional analysis by full count TOF-RBS with beryllium nanoprobe;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2012-02
2. Development of a 200 kV FIB system for non destructive three-dimensional near surface analysis;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1994-03
3. Design of a compact nuclear microprobe system with a liquid metal ion source;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1993-05
4. Design of a 200 kV FIB system with a liquid metal ion source for IC process inspection;Microelectronic Engineering;1993-04
5. Design of a 200 kV Focused Ion Beam Surface Analysis System;Japanese Journal of Applied Physics;1992-12-30