Microanalysis by Focused MeV Helium Ion Beam-Reference-Cited by-同舟云学术

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Microanalysis by Focused MeV Helium Ion Beam

Published:1987-05-20 Issue:Part 2, No. 5 Volume:26 Page:L550-L553
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Takai Mikio,Matsunaga Kouji,Inoue Kenichi,Izumi Masahiro,Gamo Kenji,Sato Mamoru,Namba Susumu

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Cited by 34 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Single-ion detection using nuclear track detector CR-39 plastic;Review of Scientific Instruments;1999-12

2. DEVELOPMENT OF AN EXTERNAL MICROBEAM-PIXE SYSTEM USING THIN FILM WINDOWS;International Journal of PIXE;1999-01

3. Diagnosis of the profile of the heavy-ion microbeam and estimation of the aiming accuracy of the single-ion-hit with using CR-39;Radiation Physics and Chemistry;1998-11

4. Application of medium energy nuclear microprobe to semiconductor process steps;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1996-09

5. Three-dimensional surface analysis system using a compact nuclear microprobe;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1995-09

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