Author:
Mimura Ryoh,Sawaragi Hiroshi,Aihara Ryuso,Takai Mikio
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by
6 articles.
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1. Simulation of fine focus time-of-flight Rutherford backscattering spectrometry using TRIM backscattering data;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2019-07
2. Nuclear nanoprobe development for visualization of three-dimensional nanostructures;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2007-08
3. Nanometer resolusion three-dimensional microprobe RBS analyses by using a 200 kV focused ion beam system;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2003-09
4. Microprobe RBS analysis of localized processed areas by FIB etching and deposition;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2001-07
5. Application of medium energy nuclear microprobe to semiconductor process steps;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1996-09