High-speed data processing for three-dimensional analysis by micro-RBS
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference12 articles.
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1. Investigation of an ion-milled Si/Cr multilayer using micro-RBS, ellipsometry and AES depth profiling techniques;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2009-06
2. Reconstruction of low-count step-like signals in ion microbeam analysis;Vacuum;2003-05
3. The energy straggling of ions implanted into a crystalline target and its effect on the lateral distribution;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1999-06
4. Microanalysis of Impurity Contamination in Masklessly Etched Area Using Focused Ion Beam;Japanese Journal of Applied Physics;1997-12-30
5. Ir and Rh silicide formation investigated by microprobe RBS;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1997-07
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