Investigation of an ion-milled Si/Cr multilayer using micro-RBS, ellipsometry and AES depth profiling techniques

Author:

Simon A.,Sulyok A.,Novák M.,Juhász G.,Lohner T.,Fried M.,Barna A.,Huszank R.,Menyhárd M.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

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4. Non-collimated beam ellipsometry

5. The new ATOMKI scanning proton microprobe

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