Author:
Takai M.,Hirai K.,Kinomura A.,Namba S.,Ishibashi K.,Inoue K.,Kawata Y.
Subject
Instrumentation,Nuclear and High Energy Physics
Cited by
10 articles.
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1. Structural and electrical characterisation of semiconductor materials using a nuclear microprobe;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1998-03
2. Irradiation-induced modifications in metal-silicon interfaces under MeV focused helium beam;Ion Beam Modification of Materials;1996
3. Development of a 200 kV FIB system for non destructive three-dimensional near surface analysis;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1994-03
4. Observation of buried oxide layers in silicon by microprobe RBS;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1993-05
5. Design of a compact nuclear microprobe system with a liquid metal ion source;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1993-05