Author:
Kinomura A.,Takai M.,Matsuo T.,Ujiie S.,Namba S.,Satou M.,Kiuchi M.,Fujii K.,Shiokawa T.
Subject
Instrumentation,Nuclear and High Energy Physics
Cited by
5 articles.
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1. Influence of beam current fluctuation on secondary electron and RBS mapping images;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1991-03
2. Evaluation of beam-induced ablation during microbeam irradiation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1991-03
3. Characterization of masklessly deposited metal lines by a micro-RBS probe;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1990-01
4. RBS tomography of SOI structures using a MeV ion microprobe;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1990-01
5. Tomography of Microstructures by Scanning Micro-RBS Probe;Japanese Journal of Applied Physics;1989-07-20