Subject
Instrumentation,Nuclear and High Energy Physics
Cited by
2 articles.
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1. System and process enhancements of the Applied Materials Precision Implant 9200;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1991-04
2. Performance of the applied materials PI9000 series ion implantation systems;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1989-02