Author:
Southwood P.D.,Bright N.J.
Subject
Instrumentation,Nuclear and High Energy Physics
Cited by
3 articles.
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1. Control system for a 300 kV ion implanter;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1994-05
2. Precision implant 9200 — An implantation system for 200 mm wafers;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1989-02
3. The precision implant 9000, a new concept in ion implantation systems;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1987-01