A comparison between pixe and rbs thin film thickness measurements in binary targets
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference33 articles.
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3. NdF3 thin films grown on carbon substrates and analyzed by RBS, PIXE, RNRA, SEM and X-ray diffraction;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1993-06
4. Thickness measurements of thin films: comparison of techniques using characteristic X-ray line ratio techniques;Thin Solid Films;1992-07
5. Particle-induced X-ray emission analysis of xenon-irradiated nitride coatings;Thin Solid Films;1991-08
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