Optimisation of SIMOX structures formed by ion beam synthesis
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference16 articles.
1. Energy Beam-Solid Interactions and Transient Thermal Processing;Margail,1985
2. New conditions for synthesizing SOI structures by high dose oxygen implantation
3. High quality Si‐on‐SiO2films by large dose oxygen implantation and lamp annealing
4. Measurement and modeling of circuit speed of CMOS on oxygen-implanted SOI
5. European SOI '88 Workshop;Colinge,1988
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1. Cluster ion bombardment on atomically flat Au(111) solid surfaces;Materials Chemistry and Physics;1998-07
2. Preparation of Pb(Zr0.52Ti484848)O3 thin films on silicon-on-insulator substrates by excimer laser deposition combined with rapid thermal annealing;Journal of Materials Science;1996
3. Characterization of Pb(Zr,Ti)O3 thin films on SOI prepared by excimer laser deposition;Integrated Ferroelectrics;1995-06
4. Electrical characterization of thin film SIMOX structures;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1993-04
5. Electrical characterization of thin film SIMOX structures;Ion Implantation Technology–92;1993
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