Subject
Instrumentation,Nuclear and High Energy Physics
Reference4 articles.
1. Ion Implantation: Equipment and Techniques;Ryding,1983
2. Ion implant round robin
Cited by
5 articles.
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1. Quantitative depth profile analysis by EPMA combined with Monte-Carlo simulation;Surface and Interface Analysis;1994-07
2. Ion implant standard;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1991-04
3. Techniques for dose matching between ion implanters;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1991-04
4. Electron probe X-ray microanalysis as a non-destructive method for the quantitative determination of ion-implanted impurities in silicon;Fresenius' Journal of Analytical Chemistry;1991
5. Ion Implantation Diagnostics and Process Control;Ion Implantation Science and Technology;1988