Ion implant round robin-Reference-Cited by-同舟云学术

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Ion implant round robin

Published:1985-01 Issue:1-2 Volume:6 Page:418-426
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Current M.I.,Keenan W.A.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference5 articles.

1. Post-implant methods for characterizing the doping uniformity and dose accuracy of ion implantation equipment

2. Electrochem. Soc. Fall Meeting;Seirmarco,1973

3. Ion Implantation Science and Technology;Current,1983

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Preparation and certification of ion-implanted reference materials: A critical review (Technical Report);Pure and Applied Chemistry;1992-01-01

2. Results of a SIMS round robin sponsored by ASTM committee E-42 on surface analysis;Surface and Interface Analysis;1989-03

3. An Industry‐Wide Evaluation of Ion Implant Dosing Accuracy;Journal of The Electrochemical Society;1988-07-01

4. Ion Implantation Diagnostics and Process Control;Ion Implantation Science and Technology;1988

5. Dosing accuracy: A comparison of several experiments;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1987-01

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