Techniques for dose matching between ion implanters-Reference-Cited by-同舟云学术

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Techniques for dose matching between ion implanters

Published:1991-04 Issue:1-4 Volume:55 Page:243-249
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Lundquist P.,Mehta S.,Black T.,Jackson D.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference8 articles.

1. Proc. 7th Int. Conf. on Ion Implantation Technology;Glawischnig,1989

2. Proc. 7th Int. Conf. on Ion Implantation Technology;Larson,1989

3. Proc. 6th Int. Conf. on Ion Implantation Technology;Larson,1987

4. Proc. 5th Int. Conf. on Ion Implantation Equipment and Techniques;Current,1985

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