Repetitive mode pulsed ion implanter with magnetically insulated diode

Author:

Krafcsik I.,Kiralyhidi L.,Riedl P.,Fried M.,Gyulai J.,Pavlyak F.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. High intensity pulsed ion beam sources and their industrial applications;Surface and Coatings Technology;1999-05

2. Damage production and self-annealing during molecular implantation analyzed by RBS and ellipsometry;Radiation Effects and Defects in Solids;1996-01

3. Application of high-power ion beams for technology;Laser and Particle Beams;1993-12

4. High intensity pulsed ion beams in material processing: Equipment and applications;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1991-02

5. Pulse Ion Beam Doping and Modification of Solids;Physica Status Solidi (a);1989-04-16

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