Application of high-power ion beams for technology-Reference-Cited by-同舟云学术

Application of high-power ion beams for technology

Published:1993-12 Issue:4 Volume:11 Page:707-731
ISSN:0263-0346
Container-title:Laser and Particle Beams
language:en
Short-container-title:Laser Part. Beams

Author:

Remnev G.E.,Shulov V.A.

Abstract

Industrial applications of high-power ion beams, basically in the field of material engineering, are presented. The results of experimental investigations of some kinds of applications, such as ion implantation, metal modification, and compounds production of thin films, are considered.

Publisher

Hindawi Limited

Subject

Electrical and Electronic Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics

Reference61 articles.

1. Preparation and characteristics of ZnS thin films by intense pulsed ion beam

2. Shimotori Y. 1990 In Proceedings of BEAMS '90, p. 1469.

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