Irradiation effects of gas-cluster CO2 ion beams on Si
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference5 articles.
1. Rarefied Gas Dynamics;Armstrong,1974
2. Cluster Formation in Expanding Supersonic Jets: Effect of Pressure, Temperature, Nozzle Size, and Test Gas
3. Optical Model for the Ellipsometric Characterization of Low Energy Ion Beam Damage in Single‐Crystal Silicon
4. Ellipsometric and Rutherford backscattering characterization of low‐energy hydrogen‐, helium‐, neon‐, and argon‐bombarded silicon
5. High-pressure fast-atom bombardment mass spectrometry: Collisional stabilization and reactions of alkali halide cluster ions
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3. Irradiation Effects of Gas Cluster Ion Beams on Co–Fe Films;Japanese Journal of Applied Physics;2013-06-01
4. Smoothing metallic glasses without introducing crystallization by gas cluster ion beam;Applied Physics Letters;2013-03-11
5. Characterization of radiation damage induced by B and B4 ion implantation into silicon;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2011-12
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