Novel SIMS system with focused massive cluster ion source for mass imaging spectrometry with high lateral resolution-Reference-Cited by-同舟云学术

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Novel SIMS system with focused massive cluster ion source for mass imaging spectrometry with high lateral resolution

Published:2014-05-01 Issue:5 Volume:7 Page:056602
ISSN:1882-0778
Container-title:Applied Physics Express
language:
Short-container-title:Appl. Phys. Express

Author:

Matsuo Jiro,Torii Souta,Yamauchi Kazuki,Wakamoto Keisuke,Kusakari Masakazu,Nakagawa Shunichiro,Fujii Makiko,Aoki Takaaki,Seki Toshio

Publisher

IOP Publishing

Subject

General Physics and Astronomy,General Engineering

Link

http://stacks.iop.org/1882-0786/7/i=5/a=056602/pdf

Reference25 articles.

1. Irradiation effects of gas-cluster CO2 ion beams on Si

2. Materials processing by gas cluster ion beams

3. Investigation of damage formation by gas cluster ion bombardment

4. Molecular dynamics simulation of damage formation by cluster ion impact

5. Generation of the large current cluster ion beam

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