Extremely high vacuum system for long-distance transport
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference5 articles.
1. A multichamber system for in situ lithography and epitaxial growth of GaAs
2. Contamination-free transfer of silicon wafers with a magnetic levitation transport system in vacuum
3. A New Multi-Electrode Evaporator for Refractory Metals and Its Application to Getter Pumps
4. Development of a bakeable cryopump for extreme high vacuum
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