A multichamber system for in situ lithography and epitaxial growth of GaAs
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1142429
Reference26 articles.
1. Scattering Suppression and High-Mobility Effect of Size-Quantized Electrons in Ultrafine Semiconductor Wire Structures
2. Emerging technology for in situ processing: Patterning alternatives
3. Maskless ion implantation technology for III–V compound semiconductors
4. Application of focused ion beam technology to maskless ion implantation in a molecular beam epitaxy grown GaAs or AlGaAs epitaxial layer for three‐dimensional pattern doping crystal growth
5. Insitupattern formation and high quality overgrowth by gas source molecular beam epitaxy
Cited by 16 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Focused Ion Beam nano-patterning from traditional applications to single ion implantation perspectives;Nanofabrication;2014-01-01
2. Focused ion beam technology and ultimate applications;Semiconductor Science and Technology;2009-03-20
3. Towards the creation of quantum dots using FIB technology;Microelectronic Engineering;2006-04
4. Exploration of the ultimate patterning potential of focused ion beams;Journal of Micro/Nanolithography, MEMS, and MOEMS;2006-01-01
5. FIB technology applied to the improvement of the crystal quality of GaN and to the fabrication of organised arrays of quantum dots;MICROELECTRON ENG;2004
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3