Development of a bakeable cryopump for extreme high vacuum
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference6 articles.
1. Proc 7th Int Vac Cong;Benvenuti,1977
2. Investigation on the low pressure limit of the Bayard–Alpert gauge
3. Attainment of extreme high vacuum (10-10Pa) by titanium getter pump.
4. Operation of a cryopumped UHV system
5. Characteristics of a bakeable ion‐cryopumped UHV system
Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Obtaining extremely high vacuum using sintered fine copper powder as a cryosorbent;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1995-01
2. Development and performance of bakeable cryopumps for extreme high vacuum;Vacuum;1993-05
3. Extremely high vacuum system for long-distance transport;Vacuum;1993-05
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