Ion sources and implantation systems-Reference-Cited by-同舟云学术

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Ion sources and implantation systems

Published:1987-06 Issue: Volume:90 Page:423-432
ISSN:0025-5416
Container-title:Materials Science and Engineering
language:en
Short-container-title:Materials Science and Engineering

Author:

Keller John H.,Robinson James W.

Publisher

Elsevier BV

Subject

General Engineering

Reference63 articles.

1. Proc. 4th Int. Conf. on Ion Implantation: Equipment and Techniques,1983

2. Proc. 5th Int. Conf. on Ion Implantation: Equipment and Techniques,1985

3. Proc. Int. Conf. on Surface Modification of Metals by Ion Beams;Goktepe,1985

4. Proc. Int. Conf. On Ion Implantation Equipment;Holmes,1979

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. The role of ion implantation in industrial sputtering processes for tribological applications;Surface and Coatings Technology;1995-09

2. Ion sources for ion beam assisted thin‐film depositiona);Review of Scientific Instruments;1992-11

3. Low energy ion-assisted deposition of metal films;Surface and Coatings Technology;1992-04

4. Ion beam assisted thin film deposition;Materials Science Reports;1991-07

5. Use of ion beam assisted deposition to modify the microstructure and properties of thin films;International Materials Reviews;1990-01

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