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Ion beam assisted thin film deposition

Published:1991-07 Issue:6 Volume:6 Page:215-274
ISSN:0920-2307
Container-title:Materials Science Reports
language:en
Short-container-title:Materials Science Reports

Author:

Hirvonen James K.

Publisher

Elsevier BV

Subject

General Engineering

Reference175 articles.

1. Metastable alloy layers produced by implantation of Ag and Ta+ions into Cu crystals

2. Metastable Materials Formation by Ion Implantation,1982

3. Ion Implantation and Ion Beam Processing of Materials,1984

4. Proceedings of the 3rd International Conference on Ion Beam Modification of Materials,1983

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