Ion sources for ion beam assisted thin‐film depositiona)
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1143432
Reference93 articles.
1. Technology and applications of broad‐beam ion sources used in sputtering. Part II. Applications
2. Ion beam bombardment effects during films deposition
3. Fundamentals of ion-beam-assisted deposition: Technique and film properties
4. Use of ion beam assisted deposition to modify the microstructure and properties of thin films
5. Modification of mechanical and chemical properties of thin films by ion bombardment
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