Defect production, degradation, and breakdown of silicon dioxide films
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference49 articles.
1. Dielectric instability and breakdown in SiO2 thin films
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3. Conduction and trapping of electrons in highly stressed ultrathin films of thermal SiO2
4. Substrate hole current and oxide breakdown
5. Ext. Abstr. 1991 Int. Conf. Solid-State Dev. and Mat.;Ozawa,1991
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