Highly ordered and well aligned TiN nanotube arrays fabricated via template-assisted atomic layer deposition
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference17 articles.
1. Physical-mechanical properties of nanostructured titanium nitride
2. Catalytic properties of high surface area titanium nitride materials
3. Remote plasma enhanced atomic layer deposition of TiN thin films using metalorganic precursor
4. Nanocrystalline TiN Derived by a Two-Step Halide Approach for Electrochemical Capacitors
5. Synthesis of nanocrystalline titanium nitride at low temperature and its thermal stability
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2. Flexible 3D Electrodes of Free-Standing TiN Nanotube Arrays Grown by Atomic Layer Deposition with a Ti Interlayer as an Adhesion Promoter;Nanomaterials;2020-02-26
3. Atomic layer deposition of metals: Precursors and film growth;Applied Physics Reviews;2019-12
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