HRTEM study of Si1−xGex multilayer-Reference-Cited by-同舟云学术

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HRTEM study of Si1−xGex multilayer

Published:1997-02 Issue:1-2 Volume:294 Page:80-83
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Werckmann J.,Chelly R.,Ulhaq-Bouillet C.,Romeo M.,Teodorescu C.,Ghica C.

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference13 articles.

1. R.H. Miles, T.C. Mc Gill, P.P. Chow, D.C. Johnson, R.J. Hauestein, C.W. Nieh and M.D. Strahtmann, Appl. Phys. Lett., 52 (1988) 916.

2. D.J. Godbey and M.G. Ancona, Appl. Phys. Lett., 61 (1992) 2217.

3. R. Quian, D. Kinosky, T. Hsu, J. Irby, A. Mahajan, S. Thomas, S. Banerjee, L. Rabenberg and C. Magee, J. Vac. Sci. Techno. A, 10 (1994) 1920.

4. H.H. Burke, I.P. Hermann, V. Tavitian and J.G. Eden, Appl. Phys. Lett, 55 (5) (1989) 253.

5. H. Wiesmann, A.K. Ghosh, T. Mc McMhon and M. Strongin, J. Appl. Phys. (50) (1979) 3752.

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Direct observation of a stacking fault in Si1-xGex semiconductors by spherical aberration-corrected TEM and conventional ADF-STEM;Journal of Electron Microscopy;2004-04-01

2. Stress field effects on the microstructure and properties ofa-C:H thin films;Journal of Applied Physics;2002-10

3. High resolution transmission electron microscopy to study very thin crystalline layers buried at an amorphous–crystalline interface;Micron;2000-06

4. Surface smoothing induced by epitaxial Si capping of rough and strained Ge or Si1−xGex morphologies: a RHEED and TEM study;Journal of Crystal Growth;1998-08

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