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Changes of properties of cured and uncured disiloxane bisbenzocyclobutene thin films under irradiation

  • Published:2013-01 Issue:1 Volume:76 Page:257-262
  • ISSN:0300-9440
  • Container-title:Progress in Organic Coatings
  • language:en
  • Short-container-title:Progress in Organic Coatings

Author:

Ivanović Nenad,Marjanović Nenad,Rakočević Zlatko,Andrić Velibor,Hadžić Branka,Vukanac Ivana,Đurđević Ivana,Srećković Milesa

Publisher

Elsevier BV

Subject

Materials Chemistry,Organic Chemistry,Surfaces, Coatings and Films,General Chemical Engineering

Reference16 articles.

1. CYCLOTENE® “Advanced Electronic Resins”, available online at: http://www.dow.com (accessed 13.08.2012).

2. Benzocyclobutene (DVS-BCB) polymer as an interlayer dielectric (ILD) material;Mills;Microelectron. Eng.,1997

3. Optical characterisation of thin film benzocyclobutene (BCB) based polymers;Beechinor;Microelectron. Eng.,1997

4. Selective wafer level adhesive bonding with benzocyclobutene for fabrication of cavities;Oberhammer;Sens. Actuators A: Phys.,2003

5. A novel packaging method using wafer-level BCB polymer bonding and glass wet-etching for RF applications;Seok;Sens. Actuators A: Phys.,2008

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