Optical characterisation of thin film benzocyclobutene (BCB) based polymers-Reference-Cited by-同舟云学术

Optical characterisation of thin film benzocyclobutene (BCB) based polymers

Published:1997-01 Issue:1-4 Volume:33 Page:363-368
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Beechinor J.T.,McGlynn E.,O'Reilly M.,Crean G.M.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference9 articles.

1. Methods and needs for low k material research;Ting,1995

2. The processing and processing of multilayer interconnection structures using thermoset films derived from bisbenzocyclotene;Burdeaux,1989

3. The determination of residual stresses in benzocyclobutene based aluminium interconnection structures;Townsend,1992

4. Optical dispersion properties of low dielectric constant materials for high performance VLSI applications;Zhao,1995

5. Real time FT-IR studies of the reaction kinetics for the polymerisation of divinyl siloxane bis-benzocyclotene monomers;Stoikich,1991

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