High precision large area PLD of X-ray optical multilayers-Reference-Cited by-同舟云学术

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High precision large area PLD of X-ray optical multilayers

Published:1998-05 Issue: Volume:127-129 Page:451-456
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Dietsch R.,Holz Th.,Mai H.,Meyer C.-F.,Scholz R.,Wehner B.

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference7 articles.

1. Scale-up of pulsed laser deposition (PLD) for 4″-wafer coating

2. E. Spiller, Soft X-ray Optics, SPIE Press, Bellingham, 1994.

3. Parallel-beam coupling into channel-cut monochromators using curved graded multilayers

4. Pulsed Laser Deposition of Laterally Graded X-Ray Optical Multilayers on Substrates of Technical Relevance

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