Scale-up of pulsed laser deposition (PLD) for 4″-wafer coating-Reference-Cited by-同舟云学术

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Scale-up of pulsed laser deposition (PLD) for 4″-wafer coating

Published:1996-04 Issue: Volume:96-98 Page:643-648
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Panzner M.,Dietsch R.,Holz Th.,Mai H.,Vo¨llmar S.

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference8 articles.

1. Fall Meeting of the Materials Research Society;Eddy,1991

2. Fall Meeting of the Materials Research Society;Smith,1992

3. High quality YBCO films grown over large areas by pulsed laser deposition

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3. Advanced nanometer-size structures;Acta Physica Slovaca. Reviews and Tutorials;2007-12-01

4. Normal-incidence pulsed-laser deposition: better method for fabrication of multilayer structures;Applied Physics A: Materials Science & Processing;2000-02-01

5. Laterally graded multilayer optics for x-ray analysis;SPIE Proceedings;1999-11-23

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