Pulsed laser deposition of large-sized superlattice films with high uniformity

Author:

Ye Biying12ORCID,Miao Tian13,Zhu Yi12,Huang Haiming12,Yang Yulong12,Shuai Mingming12,Zhu Zhifei12,Guo Hangwen1,Wang Wenbin1,Zhu Yinyan1ORCID,Yin Lifeng12456,Shen Jian12456ORCID

Affiliation:

1. State Key Laboratory of Surface Physics and Institute for Nanoelectronics Devices and Quantum Computing, Fudan University, Shanghai 200433, China

2. Department of Physics, Fudan University, Shanghai 200433, China

3. Center for Spintronics and Quantum Systems, State Key Laboratory for Mechanical Behavior of Materials, School of Materials Science and Engineering, Xi’an Jiaotong University, Xi’an 710049, China

4. Collaborative Innovation Center of Advanced Microstructures, Nanjing 210093, China

5. Shanghai Qi Zhi Institute, Shanghai 200232, China

6. Shanghai Research Center for Quantum Sciences, Shanghai 201315, China

Funder

National Key Research and Development Program of China

National Natural Science Foundation of China

Shanghai Municipal Natural Science Foundation

the Young Scientist Project of MOE Innovation Platform, and the State Key Laboratory of ASIC & Syste

Publisher

AIP Publishing

Subject

Instrumentation

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