Microstructure evolution with varied layer thickness in magnetron-sputtered Ni/C multilayer films
Author:
Publisher
Springer Science and Business Media LLC
Subject
Multidisciplinary
Link
http://www.nature.com/articles/srep31522.pdf
Reference28 articles.
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5. Takenaka, H., Kawamura, T. & Kinoshita, H. Fabrication and evaluation of Ni/C multilayer soft X-ray mirrors. Thin Solid Films 288, 99–102 (1996).
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