Author:
Nakajima K.,Akasaka Y.,Miyano K.,Takahashi M.,Suehiro S.,Suguro K.
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference6 articles.
1. Comparison of transformation to low-resistivity phase and agglomeration of TiSi/sub 2/ and CoSi/sub 2/
2. Proc. of Advanced Metallization and Interconnects Systems for ULSI Applications in 1995;Nakajima,1996
Cited by
21 articles.
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