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Deposition Technologies and Applications

Published:2001 Issue: Volume: Page:11-43
ISSN:
Container-title:Handbook of Thin Film Deposition Processes and Techniques
language:
Short-container-title:

Author:

Kern Werner,Schuegraf Klaus K.

Publisher

Elsevier

Reference76 articles.

1. Handbook of Thin Film Technology,1970

2. Thin Film Processes,1978

3. Deposition Technologies for Films and Coatings: Developments and Applications,1982

4. VLSI Fabrication Principles,1983

5. Glang, R., Ch. 1, pp. 1-3 to 1-130 in Ref. 1

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