Author:
Ebad-Sichani Saeedeh,Sharafi-Badr Paria,Hayati Payam,Jaafar Soltanian-Fard Mohammad
Abstract
In the field of investigating nano-fabrication, it is not possible to reach a single and separate definition compared to macro-fabrication. Nano-fabrication can be defined as an assembly process to produce a one-dimensional, two-dimensional, or three-dimensional structure at the nanometer scale. The importance of recognizing and examining nanofabrication techniques considering the revolution that nanofabrication compounds have in molecular adsorption, catalysis, magnetism, luminescence, nonlinear optics, and molecular sensing, have been known because they provide the possibility of reproducible mass production in this field. In this chapter, to create a general understanding of nano-fabrication and the challenge of creating nanometer size reduction, we will review new tools and techniques for the production of nanostructures, which are divided into three major parts: thin film, lithography, and engraving.
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