MEMS based sensors – A comprehensive review of commonly used fabrication techniques
Author:
Publisher
Elsevier BV
Subject
General Medicine
Reference47 articles.
1. Design of a MEMS-based motion stage based on a lever mechanism for generating large displacements and forces;Kim;J. Micromech. Microeng.,2016
2. MEMS for a watches;Noell,2004
3. A MEMS Piston-Cylinder Device Actuated by Combustion;Lee;J. Heat Transfer,2003
4. Micro Steam Engine Makes Forceful Debut;Lipkin;Science News,1993
5. Design and simulation of a novel MEMS based microfluidic circulating tumor cell (CTC) detection system for a lab on a chip device;Suriyage;IOP Conference Series: Materials Science and Engineering,2020
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