A MEMS Piston-Cylinder Device Actuated by Combustion

Author:

Lee Dae Hoon1,Park Dae-Eun2,Yoon Euisik2,Kwon Sejin3

Affiliation:

1. Division of Aerospace Engineering, Korea Advanced Institute of Science and Technology, 373-1 Kusung-dong, Yusung-Gu, Taejon 305-701, Korea

2. Division of Electrical Engineering, Korea Advanced Institute of Science and Technology, 373-1 Kusung-dong, Yusung-Gu, Taejon 305-701, Korea

3. Department of Mechanical Engineering, Division of Aerospace Engineering, Korea Advanced Institute of Science and Technology, 373-1 Kusung-dong, Yusung-ku, Taejon 305-701, Korea

Abstract

Combustion measurement in a cylindrical micro combustor, the construction procedure and test run of a MEMS reciprocating device are described. The sizing of the MEMS device was based on the findings of combustion measurements. Thermodynamic analysis of the pressure measurement resulted in available work up to 2.4 Joules in a combustor height of 2 mm and more with combustion efficiency of 0.6∼0.7. With combustor height less than 2 mm, combustion was incomplete due to excessive heat loss to the wall. In order to achieve the chamber height imposed by the combustion measurement, a fabrication process and wafer material that allow deeper etching was used.

Publisher

ASME International

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference14 articles.

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2. Mehra, A., Ayon, A. A., Waitz, I. A., and Schmidt, M. A., 1999, “Microfabrication of High-Temperature Silicon Devices Using Wafer Bonding and Deep Reactive Ion Etching,” J. Microelectromech. Syst., 9(2), pp. 152–160.

3. Sitzki, L., Borer, K., Schuster, E., Maruta K., Ronney, P. D., and Wussow, S., 2001, “Combustion in Microscale Heat-Recirculating Burners,” Proc. 3rd Asia-Pacific Conference on Combustion, pp. 473–476.

4. Ono, T., Sim, D. Y., and Esashi, M., 2000, “Imaging of Micro-Discharge in a Micro-Gap Electrostatic Actuator,” Proc. 13th IEEE International Micro Electro Mechanical Systems Conference, MEMS’00, pp. 651–654.

5. Kercher, D. S., Seriburi, P., and Allen, M. G., 1999, “An Experimental Study of Microfabricated Nickel Spark Plugs,” Proc. Solid State Sensors and Actuators Transducers ’99, pp. 1412–1415.

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