Dynamical LACBED analysis of Si/SiGe and Si/SiB multilayer structures
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference11 articles.
1. Structure of AlGaAs/GaAs multilayers imaged in superlattice reflections
2. Convergent-beam electron diffraction from GaAs/AlAs superlattices
3. Convergent-beam electron diffraction study of modulations in semiconductor superlattices
4. A treatment of dynamical diffraction for multiply layered structures
5. Effects of energy filtering in LACBED patterns
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1. Convergent-beam electron diffraction;Microscopy;2011-08-01
2. Many-beam dynamical simulation for multilayer structures without a superlattice cell;Acta Crystallographica Section A Foundations of Crystallography;2009-01-27
3. Quantitative and easy estimation of a crystal bending effect using low-order CBED patterns;Journal of Electron Microscopy;2008-09-24
4. Distortion Measurement of Multi-Finger Transistor Using Split Higher-Order Laue Zone Lines Analysis;Japanese Journal of Applied Physics;2008-05-16
5. Stress Analysis of Electronic Devices by Split-HOLZ Method;Materia Japan;2006
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