Nanolithography using field emission and conventional thermionic electron sources

Author:

Devenish R.W.,Eaglesham D.J.,Maher D.M.,Humphreys C.J.

Publisher

Elsevier BV

Subject

Instrumentation,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference14 articles.

1. Electron Microscopy and Analysis 1985;Humphreys,1986

2. Microscopy of Semiconducting Materials 1983;Joy,1983

3. The Physics and Fabrication of Microstructures and Microelectronics;Broers,1986

4. Nanometer scale electron beam lithography in inorganic materials

5. Electron Microscopy 1978;Broers,1978

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