Monolayer thickness in atomic layer deposition-Reference-Cited by-同舟云学术

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Monolayer thickness in atomic layer deposition

Published:1996-06 Issue:1-2 Volume:279 Page:124-130
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Ylilammi Markku

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference41 articles.

1. Atomic Layer Epitaxy

2. Atomic layer epitaxy

3. Physical Chemistry;Levine,1978

4. Atomic layer epitaxy;Suntola,1994

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