Author:
Raghavan Gopal,Chiang Chien,Anders Paul B.,Tzeng Sing-Mo,Villasol Reynaldo,Bai Gang,Bohr Mark,Fraser David B.
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
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4. Copper transport in thermal SiO2;Shacham-Diamand;J. Electrochem. Soc.,1993
5. Dielectric barrier study for copper metallization;Chiang,1994
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