Impact of copper contamination on the quality of silicon oxides
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.342808
Reference9 articles.
1. Breakdown in silicon oxides (II)—correlation with Fe precipitates
2. Dislocation Etch for (100) Planes in Silicon
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