Room-temperature deposition of a-SiC:H thin films by ion-assisted plasma-enhanced CVD
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference80 articles.
1. Recent progress of optical thin films in the automobile industry
2. Low temperature Rdb measurements and simulations for Si npn transistors
3. Plasma ion‐assisted deposition: A promising technique for optical coatings
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