Mass Spectrometric Study on Ions and Radicals in Tetramethylsilane Plasma for Si-containing Diamond-Like Carbon Coating-Reference-Cited by-同舟云学术

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Mass Spectrometric Study on Ions and Radicals in Tetramethylsilane Plasma for Si-containing Diamond-Like Carbon Coating

Published:2022-06-01 Issue:6 Volume:142 Page:269-275
ISSN:0385-4205
Container-title:IEEJ Transactions on Fundamentals and Materials
language:en
Short-container-title:IEEJ Trans. FM

Author:

Suzuki Shun¹,Watanabe Yoshiaki²,Ishii Koichi¹,Oda Akinori¹,Kousaka Hiroyuki³,Ohta Takayuki⁴

Affiliation:

1. Chiba Institute of Technology

2. Innovation Science Co., Ltd.

3. Gifu University

4. Meijo University

Publisher

Institute of Electrical Engineers of Japan (IEE Japan)

Subject

Electrical and Electronic Engineering

Link

https://www.jstage.jst.go.jp/article/ieejfms/142/6/142_269/_pdf

Reference33 articles.

1. (1) K. Bewilogua and D. Hofmann : “History of diamond-like carbon films: From first experiments to worldwide applications”, Surf. Coat. Technol., Vol. 242, pp. 214-225 (2014)

2. (2) 斎藤秀俊監修：DLC膜ハンドブック, （株）NTS (2006)

3. (3) S. Aisenberg and R. Chabot : “Ion-Beam Deposition of Thin Films of Diamondlike Carbon”, J. Appl. Phys., Vol. 42, pp. 2953-2958 (1971)

4. (4) A. Oda and H. Kousaka : “Numerical Analysis of Substrate-Incident Carbon Flux in Low-Pressure Radio-Frequency CH₄ Plasmas for Deposition of Diamond-Like Carbon Films”, Electron. Commun. Jpn., Vol. 98, No. 9, pp. 31-39 (2015)

5. (5) 森広行・高橋直子・中西和之・太刀川英男・大森俊英：「大気中無潤滑下におけるDLC-Si膜の低摩擦特性」, 表面技術, Vol. 59, No. 6, pp. 401-407 (2008)

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