Polishing performance and mechanism of a water-based nanosuspension using diamond particles and GO nanosheets as additives-Reference-Cited by-同舟云学术

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Polishing performance and mechanism of a water-based nanosuspension using diamond particles and GO nanosheets as additives

Published:2021-12 Issue: Volume:164 Page:107241
ISSN:0301-679X
Container-title:Tribology International
language:en
Short-container-title:Tribology International

Author:

Huang Shuiquan,Li Xuliang,Mu Dekui,Cui Changcai,Huang Hui,Huang Han

Funder

Australian Research Council

Huaqiao University

Shanghai Baosteel Group Corp

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanical Engineering,Mechanics of Materials

Reference31 articles.

1. Science and art of ductile grinding of brittle solids;Huang;Int J Mach Tools Manuf,2021

2. Chemical mechanical planarization (CMP) of on-axis Si-face SiC wafer using catalyst nanoparticles in slurry;Zhou;Surf Coat Tech,2014

3. Hybrid polishing mechanism of single crystal SiC using mixed abrasive slurry (MAS);Lee;CIRP Ann Manuf Technol,2010

4. UV-TiO2 photocatalysis-assisted chemical mechanical polishing 4H-SiC wafer;Yuan;Mater Manuf Process,2018

5. Plasma assisted polishing of single crystal SiC for obtaining atomically flat strain-free surface;Yamamura;CIRP Ann Manuf Technol,2011

Cited by 14 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Synthesis and tribological assessment of oil-based nanolubricants blended with nano-zeolite for steel–steel contact;Proceedings of the Institution of Mechanical Engineers, Part J: Journal of Engineering Tribology;2024-07-23

2. Polishing performance and mechanism of a novel Fe-based slurry for chemical mechanical polishing;Tribology International;2024-06

3. Synthesis of Al2O3@MnO2 composite abrasives and their chemical mechanical polishing performance on silicon carbide (SiC);Ceramics International;2024-06

4. Mechanism of friction-induced chemical reaction high-efficient polishing single crystal 4H-SiC wafer using pure iron;Tribology International;2024-05

5. Synthesis and lapping performance of a detonation nanodiamonds slurry by a SPS deagglomeration technology;International Journal of Refractory Metals and Hard Materials;2024-01

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