Size dependent fracture strength and cracking mechanisms in freestanding polycrystalline silicon films with nanoscale thickness-Reference-Cited by-同舟云学术

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Size dependent fracture strength and cracking mechanisms in freestanding polycrystalline silicon films with nanoscale thickness

Published:2016-12 Issue: Volume:168 Page:190-203
ISSN:0013-7944
Container-title:Engineering Fracture Mechanics
language:en
Short-container-title:Engineering Fracture Mechanics

Author:

Vayrette R.,Galceran M.,Coulombier M.,Godet S.,Raskin J.-P.,Pardoen T.

Funder

Fonds National de la Recherche Scientifique

Belgium State through the Belgium Policy Agency

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

Reference36 articles.

1. Polycrystalline silicon for integrated circuits and displays;Kamins,1998

2. Polysilicon: a versatile material for microsystems;French;Sens Actuat A,2002

3. Design of a polysilicon-on-insulator pressure sensor with original polysilicon layout for harsh environment;Malhaire;Thin Solid Films,2003

4. A surface micromachined pressure sensor based on polysilicon nanofilm piezoresistors;Wang;Sens Actuat A,2015

5. Characterization of nanometer-thick polycrystalline silicon with phonon-boundary scattering enhanced thermoelectric properties and its application in infrared sensors;Zhou;Nanoscale,2015

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